분극전계가 PZT 세라믹스의 공진주파수 온도특성에 미치는 영향

Abstract

PZT ceramic devices mostly use the substrates with the compositions near morphotropic phase boundary in PZT systems because they have the best piezoelectric property. In most applications, temperature stability of the properties of the PZT ceramic substrate is required strictly. In this study ceramics with the compositions, Zr/Ti=52/48, 53/47 and 54/46 in binary pure PZT system were fabricated and their X-ray patterns and temperature dependence of resonance frequency were measured. And the effect of poling strength on temperature dependence of resonance frequency was examined. As poling strength increased, (002) peak in X-ray diffraction patterns increased and positive temperature coefficient of resonance frequency in Zr/Ti=53/47 specimen decreased.