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The mechanical properties of the SiOC(-H) composite thin films with a low dielectric constant

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Publisher
濟州大學校 基礎科學硏究所
Location
대한민국
Citation
Choi, Chi Kyu. (2003-12). The mechanical properties of the SiOC(-H) composite thin films with a low dielectric constant. 基礎科學硏究, 제16권 제2호 [2003-12-30], 135-138
Type
Article
ISSN
1225-3200
Appears in Collections:
Natural Science > The Journal of Basic Sciences Cheju National University
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