대면적 코팅을 위한 정전기력 기반의 멀티노즐 헤드 시스템에 관한 연구

Abstract

A state of the art Electrostatic Spray Deposition (ESD) technology has been invested to develop high quality thin films for various electronic devices. In order to ensure the mass production, a multi nozzle array has been used to fabricate high uniform large area thin films. First the ESD process was thoroughly studied using single nozzle setup and then the process characteristics were used to design and execute the ESD process with multi nozzle array. The most important factors to make ESD multi nozzle were; difference of nozzle length, angle of nozzle and second electrode. To achieve a uniform spray, the difference of nozzle length must be under ±20 μm and angle has to be perpendicular for second electrode. In order to achieve uniformed thin film at large area, the space length between of unit ESD Nozzles is strictly controlled. The space length was adapted shorter than sprayed cone-jet angle of unit ESD nozzle, because of electrical repulsive force between cation in cone-jet. Under the present research, arrayed ESD multi nozzle which has a length 200 mm and a nozzle space 2 mm, was produced and 465 nm film was developed under 14.1% of uniformity.