디스플레이 전극 제작을 위한 전기수력학적 프린팅 공정에 관한 연구

Abstract

In this study we introduced new technology and system of electro hydro dynamic printing to make direct patterning for printed electronics. Electro hydro dynamic printing technology is suggested for electrode pattern less than 5um and repair process of shorted electrode pattern due to miniaturization, light weight, integration of electronics devices by rapid emerging printed electronics industry. Electro hydro dynamic printing technology overcame several fatal disadvantages of traditional inkjet printing technology. Traditional photo-lithography process of MEMS process is capable of precise micro pattern but, has several disadvantages such like high cost, environmental problems caused by harmful chemicals, waste materials. It has limitation to use photo-lithography for fabrication of electronics devices by efficient cost, environmental-friendly process. Various printing process is applied to overcome photo-lithography's disadvantages by developing flexible electronics. ink jet printing technology of non-contact printing process is capable of direct patterning without substrate damage and recently a lot of research work has been going on. It is difficult to apply for fabrication of electronic devices deu to limitation of micro pattern less than 10um, viscosity more than 50cps. we developed integration control software that is capable of control of patterning head and patterning system for implementation 5um electrode pattern by using electro hydro dynamic printing process. we did experiment of electrode patterning according to applied voltage and material supply pressure and implemented 5um electrode pattern with ±0.194 of standard deviation by using electro hydro dynamic printing process.