센서소자 응용을 위한 전기수력학 기반 프린팅 공정 및 시스템 개발

Abstract

Direct patterning is one of the core technologies for elecrode patterning and coating method, which controls nano-scale objects in desired shapes to form structures with a precision of several nano meters to dozens of micro meter. The most typical nano-micro device fabrication technologies are semi conductor processes. Semiconductor manufacturing process is a 9 step subtractive process. It is called photolithography process and used for various electronic device applications such as power devices, smart phones, tablet PCs, micro controllers, converters and so on. In this situation, electrohydrodynamics based printing technology is emerging as an alternative to conventional semiconductor processes and being environmentally friendly and having high uniformity and precision. Electrohydrodynamics based printing technology is simpler, more controllable, cost effective as compared to the conventional electronic printing process technologies, enabling micro to nano-scale patterning, continuous thin film formation, high resolution pattern formation and nanofiber formation. In this study, the formation of micro pattern using an electrohydrodynamic printing process is explained and on the basis of it, the electrohydrodynamic based printing process system That can fabricated electronic devices is developed. Moreover, a high resolution micro-electrode pattern was implemented for application of sensor element, through process control, and various applications such as DO (dissolved oxygen)/ ROS (reactive oxygen) sensor, biodegradable complex high-molecular pressure sensor, and superfine sensor and moisture sensor applications of 10μm