유전체의 정밀 기공 정렬을 통한 고민감도 압력센서 제작

Abstract

People's interest in wearable devices has increased, and pressure sensors applied to them are being actively developed. In this study, we proposed a novel porous dielectric fabrication method in order to overcome the reproducibility of the conventional porous dielectric fabrication method applied to pressure sensors. In the conventional porous dielectric fabrication method, the sensitivity and accuracy of the pressure sensor are decreased, because the size and spacing of pores are not constant.Therefore, we proposed the dielectric fabrication method which controlled the porous structure through mold and needles. The dielectric has pore sizes of 300 μm, 400 μm, and 500 μm with intervals of 1 mm, 1.5 mm and 2 mm, respectively. The pressure sensors were made using the fabricated dielectrics and the metal thin film, and then characteristics evaluation such as sensitivity, sensing limit, and response time was performed.We confirmed that the larger the pore size and the narrower the gap, the higher the sensitivity. When the pore size is 500 μm and the spacing is 1 mm, the sensitivity is 1.277 kPa-1 in the range of 0.5 kPa or less, which is 11 times higher than that of the bulk dielectric-based pressure sensor. The response time was 100 ms with similar result when compared to conventional pressure sensors. This is significantly lower in pore size than the conventional pressure sensor, but it seems to have a similar performance by improving the sensitivity at a constant size and spacing of pores.Therefore, the precision pore-aligned dielectric-based pressure sensors resulting in this study are expected to have sufficient potential for use in wearable and healthcare devices.sterilization was injected, the ORP value did not remain proportionally linear at the high TRO concentration, so it was confirmed that a separate ozone injection rate algorithm was needed. As a result of analyzing the TRO tolerance of Oliver flounder in the flow-through method, it was possible to confirm the stability of the fish at 30 ppb or less.