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Electrical and optical properities of SiOC films with Low Dielectric Constant

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Author(s)
최치규
Publication Year
2005-02
URI
https://oak.jejunu.ac.kr/handle/2020.oak/2838
Publisher
濟州大學校 基礎科學硏究所
Location
대한민국
Citation
최치규. (2005-02). Electrical and optical properities of SiOC films with Low Dielectric Constant. 基礎科學硏究, 제17권 제2호 [2005-02-01], 139-144
Type
Article
ISSN
1225-3200
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