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Formaion and epitaxial growth of titanium-disilicide on Si(111)

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Author(s)
조경익
Publication Year
1992-12
URI
https://oak.jejunu.ac.kr/handle/2020.oak/3987
Publisher
濟州大學校 基礎科學硏究所
Location
대한민국
Citation
조경익. (1992-12). Formaion and epitaxial growth of titanium-disilicide on Si(111). 基礎科學硏究, 제5권 제1호, 105-116
Type
Article
ISSN
1225-3200
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