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A Study on Low Dielectric Material Deposition Using a Helicon Plasma Source

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Author(s)
최치규
Publication Year
1996-12
URI
https://oak.jejunu.ac.kr/handle/2020.oak/4003
Publisher
濟州大學校 基礎科學硏究所
Location
대한민국
Citation
최치규. (1996-12). A Study on Low Dielectric Material Deposition Using a Helicon Plasma Source. 基礎科學硏究, 제9권 제2호, 161-166
Type
Article
ISSN
1225-3200
Appears in Collections:
Natural Science > The Journal of Basic Sciences Cheju National University
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