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PVD방법에 의한 Tin barrier metal 형성과 공정개발

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Author(s)
이정용
Issued Date
1997-12
URI
https://oak.jejunu.ac.kr/handle/2020.oak/5042
Publisher
濟州大學校 基礎科學硏究所
Location
대한민국
Citation
이정용. (1997-12). PVD방법에 의한 Tin barrier metal 형성과 공정개발. 基礎科學硏究, 제10권 제2호 [1997-12-30], 179-186
Type
Article
ISSN
1225-3200
Appears in Collections:
Natural Science > The Journal of Basic Sciences Cheju National University
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