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Deposition and Characterization of Low-Dielectric-Constant SiOC(-H) Thin Films for Interlayer Dielectrics in Multilevel Interconnections

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Author(s)
Young Jun JANG
Publication Year
2007-12
URI
https://oak.jejunu.ac.kr/handle/2020.oak/573
Publisher
濟州大學校 基礎科學硏究所
Location
대한민국
Citation
Young Jun JANG. (2007-12). Deposition and Characterization of Low-Dielectric-Constant SiOC(-H) Thin Films for Interlayer Dielectrics in Multilevel Interconnections. 基礎科學硏究, 20권 2호, 207-212
Type
Article
ISSN
1225-3200
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