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Study on the Bonding Structures of Nano-Pore SiOC(-H) Films Deposited by UV-Source Assisted PECVD

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Publisher
濟州大學校 基礎科學硏究所
Location
대한민국
Citation
Chang Sil Yang and Chi Kyu Choi. (2006-08). Study on the Bonding Structures of Nano-Pore SiOC(-H) Films Deposited by UV-Source Assisted PECVD. 基礎科學硏究, 19권 1호, 207-211
Type
Article
ISSN
1225-3200
Appears in Collections:
Natural Science > The Journal of Basic Sciences Cheju National University
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