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복합 구조 나노 TiOx 박막의 heat mirror 특성 연구

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Alternative Title
Study on heat mirror properties of composite nano TiOx thin films
Abstract
Heat mirror has a high visible transmittance and an infrared reflectance,which can be used as heat insulation coatings. We have grown titanium oxidenanocolumnar thin films on glass substrates for heat mirror application bydirect-current (DC) magnetron sputtering methods. The composite titaniumoxide of metallic and dielectric phases including Ti2O3, TiO2 and amorphousTiOx were found. During the thin film growth, we have changed the plasmapower (from 100 to 200 W) to control the population and energy of plasmaspecies, and then studied their effects on the heat mirror properties. Also byaltering the deposition times (2, 5 and 10 min), we investigated the optimalthickness of thin films with respect to the heat mirror characteristics.Interestingly the narrow visible transmittance bands with the bandwidth of~350 nm at ~500 nm and the excellent infrared reflectance, up to 60 % at 2300nm, were observed. The self-cleaning properties of the heat mirror films werealso confirmed.
Author(s)
장지원
Issued Date
2021
Awarded Date
2021. 2
Type
Dissertation
URI
https://oak.jejunu.ac.kr/handle/2020.oak/23537
Alternative Author(s)
Jang, Ji Won
Affiliation
제주대학교 대학원
Department
대학원 에너지응용시스템학부 물리학전공
Advisor
서혜원
Table Of Contents
List of Figures ⅳ
List of Tables ⅵ
SUMMARY ⅶ
I. 서론 1
II. 이론 3
1. 열반사 거울 3
2. DC 마그네트론 스퍼터링 8
3. 광 방출 분광법 10
4. 자외-가시광-근적외선 분광법 10
5. X선 회절 분석법 12
6. 라만 분광법 13
III. 실험 및 방법 15
1. 실험 방법 및 실험 장치 15
2. TiOx 박막의 특성 분석 17
IV. 결과 및 고찰
1. 플리즈마 종의 에너지 분석 20
2. TiOx 박막의 구조 및 결정 특성 분석 26
3. TiOx 박막의 광학적 특성 분석 36
4. TiOx 박막의 전기적 특성 분석 42
5. TiOx 박막의 친수성 45
V. 결론 47
참고문헌 49
Appendix : List of Publications 53
Degree
Master
Publisher
제주대학교 대학원
Citation
장지원. (2021). 복합 구조 나노 TiOx 박막의 heat mirror 특성 연구
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Faculty of Applied Energy System > Physics
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