복합 구조 나노 TiOx 박막의 heat mirror 특성 연구

Abstract

Heat mirror has a high visible transmittance and an infrared reflectance,which can be used as heat insulation coatings. We have grown titanium oxidenanocolumnar thin films on glass substrates for heat mirror application bydirect-current (DC) magnetron sputtering methods. The composite titaniumoxide of metallic and dielectric phases including Ti2O3, TiO2 and amorphousTiOx were found. During the thin film growth, we have changed the plasmapower (from 100 to 200 W) to control the population and energy of plasmaspecies, and then studied their effects on the heat mirror properties. Also byaltering the deposition times (2, 5 and 10 min), we investigated the optimalthickness of thin films with respect to the heat mirror characteristics.Interestingly the narrow visible transmittance bands with the bandwidth of~350 nm at ~500 nm and the excellent infrared reflectance, up to 60 % at 2300nm, were observed. The self-cleaning properties of the heat mirror films werealso confirmed.