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ICP-CVD 방법에 의한 TIN barrier metal 형성과 특성

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Author(s)
최치규
Issued Date
1999-12
URI
https://oak.jejunu.ac.kr/handle/2020.oak/511
Publisher
濟州大學校 基礎科學硏究所
Location
대한민국
Citation
최치규. (1999-12). ICP-CVD 방법에 의한 TIN barrier metal 형성과 특성. 基礎科學硏究, 제12권 [1999-12-30], 41-49
Type
Article
ISSN
1225-3200
Appears in Collections:
Natural Science > The Journal of Basic Sciences Cheju National University
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