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The chemical bond structure investigation on the Si-O-C(-H) composite low dielectric constant thin films

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Author(s)
Choi, Chi Kyu
Issued Date
2001-12
Type
Article
URI
https://oak.jejunu.ac.kr/handle/2020.oak/8557
Publisher
濟州大學校 基礎科學硏究所
Location
대한민국
Citation
Choi, Chi Kyu. (2001-12). The chemical bond structure investigation on the Si-O-C(-H) composite low dielectric constant thin films. 基礎科學硏究, 제14권 제2호 [2001-12-30], 31-37
ISSN
1225-3200
Appears in Collections:
Natural Science > The Journal of Basic Sciences Cheju National University
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